Precise Surface Orientation Mapping with Omega-Scan
Even within a single crystal, slight variations in crystal orientation can occur across the surface, often due to internal strains from lattice defects. Similarly, well-grown thin films can display unique in-plane orientation distributions.
Mapping such surfaces typically requires numerous measurements, and this is where the Omega-Scan method excels with its speed and efficiency. The image below illustrates an orientation map measured on a (Si, Ge) solid solution wafer, where the maximum orientation difference is just 0.03°. The concentric circles in the map correspond to the crystal’s growth rings, providing valuable insights into its structure.
Related Technologies: Omega-scan, Theta-scan
Related Solutions and Industries: Epitaxial Layers & Thin Films
